Phase-shifting grating projection moire topography

被引：71

作者：

Choi, YB ^{[1
]}

Kim, SW ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Mech Engn, Taejon 305701, South Korea

来源：

OPTICAL ENGINEERING | 1998年 / 37卷 / 03期

关键词：

projection moire topography; phase-shifting fringe analysis; line-gratings; three-dimensional inspection of fine objects; time-integral fringe capturing;

D O I：

10.1117/1.601934

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A phase-shifting projection moire method particularly intended for high-speed three-dimensional inspection of fine objects is presented. Emphasis is on realization of phase-shifting fringe analysis in projection moire topography using a set of line grating pairs designed to provide different phase shifts in sequence. Further, a time-integral fringe capturing scheme is devised to remove undesirable high-frequency original grating patterns in real time without time-consuming software image processing. Finally, the performances of the proposed method are discussed with measurement results. (C) 1998 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(98)03503-X].

引用

页码：1005 / 1010

页数：6

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