共 24 条
[2]
Bakin AS, 1996, INST PHYS CONF SER, V142, P433
[6]
FUJIWARA Y, 1985, APPL PHYS LETT, V49, P388
[8]
HONG LS, 1994, I PHYS C SER, V137, P239
[9]
EPITAXIAL-GROWTH AND ELECTRICAL CHARACTERISTICS OF BETA-SIC ON SI BY LOW-PRESSURE RAPID THERMAL CHEMICAL-VAPOR-DEPOSITION
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1995, 34 (03)
:1447-1450