Miniature piezoelectric motors

被引:276
作者
Morita, T [1 ]
机构
[1] Swiss Fed Inst Technol, Dept Mat, Ceram Lab, EPFL, CH-1015 Lausanne, Switzerland
关键词
actuator; micro-motor; ultrasonic motor; ferroelectric film;
D O I
10.1016/S0924-4247(02)00405-3
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
There is great demand for micro- or miniaturized actuators for practical application. However, magnetic coils of electromagnetic motors are an obstacle to such miniaturization because of their complicated construction. Furthermore, electrostatic micro-motors fabricated by IC-processing cannot generate sufficient output power. Piezoelectric motors are promising because of their simple construction and high power density. In fact, some piezoelectric actuators have been or are close to being launched in the market. For their miniaturization, proper fabrication processes including thick deposition methods are important. In this review, various principles of piezoelectric motors are introduced in addition to suitable fabrication processes. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:291 / 300
页数:10
相关论文
共 59 条
[1]  
ABBAS A, 1996, P 5 INT C NEW ACT AC, P53
[2]   Jet molding system for realization of three-dimensional micro-structures [J].
Akedo, J ;
Ichiki, M ;
Kikuchi, K ;
Maeda, R .
SENSORS AND ACTUATORS A-PHYSICAL, 1998, 69 (01) :106-112
[3]   Efficient and stable grinding of ceramics by electrolytic in-process dressing (ELID) [J].
Bandyopadhyay, BP ;
Ohmori, H ;
Takahashi, I .
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 1997, 66 (1-3) :18-24
[4]   DESIGN CONSIDERATIONS FOR MICROMACHINED ELECTRIC ACTUATORS [J].
BART, SF ;
LOBER, TA ;
HOWE, RT ;
LANG, JH ;
SCHLECHT, MF .
SENSORS AND ACTUATORS, 1988, 14 (03) :269-292
[5]  
BERG U, 1998, P ACTUATOR 98, V98, P552
[6]   Characteristics of a piezoelectric miniature motor [J].
Bexell, M ;
Johansson, S .
SENSORS AND ACTUATORS A-PHYSICAL, 1999, 75 (02) :118-130
[7]   Stick and Slip Actuators: design, control, performances and applications [J].
Breguet, JM ;
Clavel, R .
MHS '98, PROCEEDINGS OF THE 1998 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE, 1998, :89-95
[8]   Mn-modified Pb(Mg1/3Nb2/3)O3-PbTiO3 ceramics:: Improved mechanical quality factors for high-power transducer applications [J].
Chen, YH ;
Hirose, S ;
Viehland, D ;
Takahashi, S ;
Uchino, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (08) :4843-4852
[9]   EFFECTS OF MATERIAL AND PROCESSING PARAMETERS ON DIELECTRIC STRENGTH OF THERMALLY GROWN SIO2 FILMS [J].
CHOU, NJ ;
ELDRIDGE, JM .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (10) :1287-+
[10]   Crystal orientation dependence of piezoelectric properties in lead zirconate titanate: Theoretical expectation for thin films [J].
Du, XH ;
Belegundu, U ;
Uchino, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (9A) :5580-5587