Systematic study of amorphous hydrogenated and fluorinated carbon films

被引：29

作者：

Lamperti, A

Ossi, PM

机构：

[1] INFM, I-20133 Milan, Italy

[2] Politecn Milan, Dipartimento Ingn Nucl, I-20133 Milan, Italy

来源：

APPLIED SURFACE SCIENCE | 2003年 / 205卷 / 1-4期

关键词：

thin films; amorphous fluorinated carbon; PACVD; Raman spectroscopy; mechanical properties;

D O I：

10.1016/S0169-4332(02)01041-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Amorphous fluorinated carbon films were grown from CF(4) and C(2)H(2) mixtures, using a Plasma Assisted Chemical Vapour Deposition (PACVD) apparatus. Two sets of films were deposited, changing in a systematic way the CF(4) flux and the bias voltage (V(b)). Film composition and structure were analysed by secondary ion mass spectroscopy (SIMS), infrared (IR) and Raman spectroscopies. Film hardness was obtained by micro-indentation measurements. On increasing fluorine content in films, hardness decreases and a fluorescence background in Raman spectra appears at high fluorine content, showing a diamond- to polymer-like structural transition. Infrared spectra indicate the presence of -CF(x), C=CHF and C=CF(2) groups in the films. Our data are compared with previous results in the literature and the mechanisms involved in film formation are discussed, especially regarding fluorine substitution for hydrogen. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：113 / 120

页数：8

共 35 条

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