Single Schottky-barrier photodiode with interdigitated-finger geometry: Application to diamond

被引:104
作者
Liao, Meiyong
Koide, Yasuo
Alvarez, Jose
机构
[1] ICYS, NIMS, Tsukuba, Ibaraki 3050044, Japan
[2] NIMS, Sensor Mat Ctr, Tsukuba, Ibaraki 3050044, Japan
[3] Univ Paris 06, Ecole Super Elect, CNRS, Lab Genie Elect Paris,UMR 8507, F-91192 Gif Sur Yvette, France
[4] Univ Paris 11, Ecole Super Elect, CNRS, Lab Genie Elect Paris,UMR 8507, F-91192 Gif Sur Yvette, France
关键词
D O I
10.1063/1.2715440
中图分类号
O59 [应用物理学];
学科分类号
摘要
The authors propose a single Schottky-barrier photodiode (SPD) with interdigitated Ohmic and Schottky contacts. A homoepitaxial diamond layer with low boron concentration has been utilized as an example for the fabrication of solar-blind deep-ultraviolet detector. This device structure enables the operations in both photoconductive mode with large photocurrent gain and depletion mode with fast response speed. The photosensitivity and spectral response of such kind of device are greatly improved when compared with a conventional SPD with semitransparent dotted Schottky contact. The present device structure can be extended to other semiconductor photodetectors. (c) 2007 American Institute of Physics.
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页数:3
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