Improvement of discharge capacity of LiCoO2 thin-film cathodes deposited in trench structure by liquid-delivery metalorganic chemical vapor deposition

被引：25

作者：

Cho, SI ^{[1
]}

Yoon, SG ^{[1
]}

机构：

[1] Chungnam Natl Univ, Dept Mat Engn, Taejon 305764, South Korea

来源：

APPLIED PHYSICS LETTERS | 2003年 / 82卷 / 19期

关键词：

D O I：

10.1063/1.1571958

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Pt collector and LiCoO2 cathode films were deposited onto trench-SiO2/Si substrates by liquid-delivery metalorganic chemical vapor deposition (LDMOCVD). The 100-nm-thick Pt thin films deposited at 350 degreesC showed the lowest resistivity and roughness and step-coverage of 57% in trench structure (aspect ratio-1). The LiCoO2 cathode films (step-coverage=51%) deposited onto a Pt collector showed an increase of approximately two and half times the discharge capacity compared with those of planar-cathode films. The LDMOCVD process is suitable to improve the discharge capacity of LiCoO2 cathode films using a trench structure in lithium rechargeable batteries. (C) 2003 American Institute of Physics.

引用

页码：3345 / 3347

页数：3

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