Low weight spreading resistance profiling of ultrashallow dopant profiles

被引:27
作者
De Wolf, P
Clarysse, T
Vandervorst, W
Hellemans, L
机构
[1] IMEC, B-3001 Louvain, Belgium
[2] Katholieke Univ Leuven, B-3001 Louvain, Belgium
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1998年 / 16卷 / 01期
关键词
D O I
10.1116/1.589817
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The application of the conventional spreading resistance profiling (SRP) method on ultrashallow profiles is endangered by the phenomenon of pressure enhanced carrier spilling which results in false dopant and carrier profile differences, the need for large correction factors, and the presence of surfaces states on the bevel. Furthermore, the tedious preparation of the conventional SRP probes requires a lot of expertise. In this work, it is shown that some of these limitations can be resolved by the application of the nano-SRP technique on beveled samples. The use of a single conductive diamond-coated silicon tip mounted on an atomic force microscope (AFM) maintains the strong points of SRP while eliminating the need for probe conditioning. Contact sizes for nano-SRP are a factor of one hundred smaller than in conventional SRP. The small contact size combined with small probe movements allows for considerably larger bevel angles and provides a geometrical resolution as small as 0.5 nm. The smaller contact, i.e., 20-50 nm in diameter, reduces the SRP correction factor by a factor of 20. The much smaller pressure interaction volume reduces the pressure enhanced carrier spilling component. As a consequence, the application of the so-called zero field Poisson contact model becomes more feasible. (C) 1998 American Vacuum Society.
引用
收藏
页码:401 / 405
页数:5
相关论文
共 16 条
[1]   OPTIMIZATION OF THE SPREADING RESISTANCE PROFILING TECHNIQUE FOR SUBMICRON STRUCTURES [J].
BERKOWITZ, HL ;
BURNELL, DM ;
HILLARD, RJ ;
MAZUR, RG ;
RAICHOUDHURY, P .
SOLID-STATE ELECTRONICS, 1990, 33 (06) :773-781
[2]   COMPARISON OF CARRIER PROFILES FROM SPREADING RESISTANCE ANALYSIS AND FROM MODEL-CALCULATIONS FOR ABRUPT DOPING STRUCTURES [J].
CASEL, A ;
JORKE, H .
APPLIED PHYSICS LETTERS, 1987, 50 (15) :989-991
[3]   SPREADING RESISTANCE ANALYSIS BASED ON THE METHOD OF REGULARIZATION [J].
CHOO, SC ;
LEONG, MS ;
LEE, YT .
SOLID-STATE ELECTRONICS, 1993, 36 (01) :1-11
[4]   Sheet resistance corrections for spreading resistance ultrashallow profiling [J].
Clarysse, T ;
Vandervorst, W ;
Pawlik, M .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (01) :390-396
[5]   Recent insights into the physical modeling of the spreading resistance point contact [J].
Clarysse, T ;
DeWolf, P ;
Bender, H ;
Vandervorst, W .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (01) :358-368
[6]   AUTOMATIC-GENERATION OF SHALLOW ELECTRICALLY ACTIVE DOPANT PROFILES FROM SPREADING RESISTANCE MEASUREMENTS [J].
CLARYSSE, T ;
VANDERVORST, W .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (01) :290-297
[7]   A CONTACT MODEL FOR POISSON-BASED SPREADING RESISTANCE CORRECTION SCHEMES INCORPORATING SCHOTTKY-BARRIER AND PRESSURE EFFECTS [J].
CLARYSSE, T ;
VANDERVORST, W .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (01) :413-420
[8]   LASER INTERFEROMETER BEVEL ANGLE MEASUREMENT FOR SPREADING RESISTANCE PROFILING [J].
DAVANZO, DC ;
CLARE, C ;
DELLOCA, C .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (12) :2704-2708
[9]  
DAVANZO DC, 1977, 50132 STANF TECHN
[10]   One- and two-dimensional carrier profiling in semiconductors by nanospreading resistance profiling [J].
DeWolf, P ;
Clarysse, T ;
Vandervorst, W ;
Snauwaert, J ;
Hellemans, L .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (01) :380-385