RESIDUAL COMPRESSION IN NI FILM PREPARED BY LASER-ABLATION

被引：2

作者：

KEITOKU, S ^{[1
]}

EZUMI, H ^{[1
]}

机构：

[1] HIROSHIMA DENKI INST TECHNOL,DEPT ELECT ENGN,HIROSHIMA 73903,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1994年 / 33卷 / 1B期

关键词：

LASER ABLATION; NI FILM; RESIDUAL STRESS; COMPRESSION; STREAK IMAGE; SPECTRUM OF PLUME;

D O I：

10.1143/JJAP.33.L129

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Large residual compression with the value of (3 similar to 4)10(9) N/m(2) has been observed in Ni films prepared by the laser ablation method using a YAG laser. The origin of compression has been discussed based on the results of X-ray diffraction, streak image of ablated particles and spectrum of the plume. These experiments showed that excited Ni atoms combined with nitrogen remaining in the vacuum chamber and formed nitride (Ni3N) which caused compression in the film.

引用

页码：L129 / L130

页数：2

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