PROPERTIES OF LPCVD ALUMINUM FILMS PRODUCED BY DISPROPORTIONATION OF ALUMINUM MONOCHLORIDE

被引：14

作者：

LEVY, RA

GALLAGHER, PK

CONTOLINI, R

SCHREY, F

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 02期

关键词：

D O I：

10.1149/1.2113865

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：457 / 463

页数：7

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[5]

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