CHARACTERIZATION OF LPCVD ALUMINUM FOR VLSI PROCESSING

被引：84

作者：

LEVY, RA

GREEN, ML

GALLAGHER, PK

机构：

来源：

关键词：

D O I：

10.1149/1.2116043

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2175 / 2182

页数：8

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