ELECTROMIGRATION IN FINE-LINE SPUTTER-GUN AL

被引：43

作者：

VAIDYA, S

FRASER, DB

LINDENBERGER, WS

机构：

来源：

关键词：

D O I：

10.1063/1.328269

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4475 / 4482

页数：8

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[9]

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