CONTACTLESS MEASUREMENT OF PHOTOINDUCED CARRIER LIFETIME AND INJECTION LEVEL IN SILICON-WAFER USING ADDITIONAL EDDY-CURRENT

被引：8

作者：

MAEKAWA, T ^{[1
]}

INOUE, S ^{[1
]}

USAMI, A ^{[1
]}

机构：

[1] NAGOYA INST TECHNOL,DEPT ELECTR,SHOWA KU,NAGOYA,AICHI 466,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1983年 / 22卷 / 06期

关键词：

D O I：

10.1143/JJAP.22.968

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：968 / 974

页数：7

共 19 条

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