SELECTED AREA, STATIONARY BEAM CRATERING FOR HIGH-SENSITIVITY DEPTH PROFILING WITH A COMPUTERIZED AUGER MICROPROBE

被引：3

作者：

POPPA, H ^{[1
]}

COTAARAIZA, L ^{[1
]}

机构：

[1] UNIV NACL AUTONOMA MEXICO,INST FIS,ENSENADA LAB,ENSENADA,BAJA CALIFORNIA,MEXICO

来源：

关键词：

D O I：

10.1016/0040-6090(84)90182-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：217 / 228

页数：12

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