HIGH-RESOLUTION REFLECTION ELECTRON-MICROSCOPY OF SI(111)7X7 SURFACES USING A HIGH-VOLTAGE ELECTRON-MICROSCOPE

被引：18

作者：

KOIKE, H

KOBAYASHI, K

OZAWA, S

YAGI, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 05期

关键词：

D O I：

10.1143/JJAP.28.861

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：861 / 865

页数：5

共 25 条

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