REPAIR OF TRANSPARENT DEFECTS ON PHOTOMASKS BY LASER-INDUCED METAL-DEPOSITION FROM AN AQUEOUS-SOLUTION

[1] Bard A. J, 1985, STANDARD POTENTIALS

[2] BORGARELLO E, 1985, NEW J CHEM, V9, P743

[3] BURGGRAAF P, 1988, SEMICOND INT, P76

[4] Drozdowicz Z., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V633, P166, DOI 10.1117/12.963717

[5] EHRLICH DJ, 1984, APPL PHYS LETT, V44, P267, DOI 10.1063/1.94694

[6] ONE-STEP REPAIR OF TRANSPARENT DEFECTS IN HARD-SURFACE PHOTOLITHOGRAPHIC MASKS VIA LASER PHOTODEPOSITION [J]. ELECTRON DEVICE LETTERS, 1980, 1 (06): : 101 - 103

[7] FISANICK GJ, 1987, Patent No. 4636403

[8] GRATZEL M, 1982, J PHYS CHEM-US, V86, P2964

[9] A CHEMICAL AND MECHANISTIC VIEW OF REACTION PROFILESIN LASER DIRECT-WRITE METALLIZATION IN METALLOORGANIC FILMS - GOLD [J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (02) : 529 - 533

[10] COMPARISON OF FOCUSED ION BEAM AND LASER TECHNIQUES FOR OPTICAL MASK REPAIR. [J]. Microelectronic Engineering, 1987, 6 (1-4) : 597 - 603

[1] Bard A. J, 1985, STANDARD POTENTIALS

[2] BORGARELLO E, 1985, NEW J CHEM, V9, P743

[3] BURGGRAAF P, 1988, SEMICOND INT, P76

[4] Drozdowicz Z., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V633, P166, DOI 10.1117/12.963717

[5] EHRLICH DJ, 1984, APPL PHYS LETT, V44, P267, DOI 10.1063/1.94694

[6] ONE-STEP REPAIR OF TRANSPARENT DEFECTS IN HARD-SURFACE PHOTOLITHOGRAPHIC MASKS VIA LASER PHOTODEPOSITION [J]. ELECTRON DEVICE LETTERS, 1980, 1 (06): : 101 - 103

[7] FISANICK GJ, 1987, Patent No. 4636403

[8] GRATZEL M, 1982, J PHYS CHEM-US, V86, P2964

[9] A CHEMICAL AND MECHANISTIC VIEW OF REACTION PROFILESIN LASER DIRECT-WRITE METALLIZATION IN METALLOORGANIC FILMS - GOLD [J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (02) : 529 - 533

[10] COMPARISON OF FOCUSED ION BEAM AND LASER TECHNIQUES FOR OPTICAL MASK REPAIR. [J]. Microelectronic Engineering, 1987, 6 (1-4) : 597 - 603