FORMATION AND CRYSTALLIZATION OF AMORPHOUS SILICIDES AT THE INTERFACE BETWEEN THIN METAL AND AMORPHOUS-SILICON FILMS

被引：16

作者：

HERD, SR

AHN, KY

TU, KN

机构：

来源：

THIN SOLID FILMS | 1983年 / 104卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(83)90562-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：197 / 206

页数：10

共 9 条

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[4]

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