CHARACTERIZATION OF ION-IMPLANTATION DOPING OF STRAINED-LAYER SUPERLATTICES .1. STRUCTURAL-PROPERTIES

被引:12
作者
MYERS, DR
PICRAUX, ST
DOYLE, BL
ARNOLD, GW
BIEFELD, RM
机构
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D O I
10.1063/1.337570
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O59 [应用物理学];
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页码:3631 / 3640
页数:10
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