PHASE-TRANSFORMATION AND IMPURITY REDISTRIBUTION DURING PULSED LASER IRRADIATION OF AMORPHOUS-SILICON LAYERS

被引：42

作者：

NARAYAN, J

WHITE, CW

HOLLAND, OW

AZIZ, MJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 06期

关键词：

D O I：

10.1063/1.334192

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1821 / 1830

页数：10

共 17 条

[1] EXPLOSIVE CRYSTALLIZATION OF A-SI FILMS IN BOTH THE SOLID AND LIQUID-PHASES [J].

AUVERT, G ;

BENSAHEL, D ;

PERIO, A ;

NGUYEN, VT ;

ROZGONYI, GA .

APPLIED PHYSICS LETTERS, 1981, 39 (09) :724-726

[2]

GELLISON GE, 1982, APPL PHYS LETT, V41, P180

[3]

GELLISON GE, UNPUB

[4]

Gilmer G. H., 1980, LASER ELECTRON BEAM, P227

[5]

KODERA H, 1965, JPN J APPL PHYS, V2, P212

[6] NATURE OF UNSEEDED CRYSTALLIZATION IN SEMICONDUCTORS. [J].

Narayan, J. .

Materials Letters, 1984, 2 (03) :219-222

[7] MELTING PHENOMENA AND PULSED-LASER ANNEALING IN SEMICONDUCTORS [J].

NARAYAN, J ;

FLETCHER, J ;

WHITE, CW ;

CHRISTIE, WH .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (12) :7121-7128

[8] SOLID-PHASE-EPITAXIAL GROWTH AND FORMATION OF METASTABLE ALLOYS IN ION-IMPLANTED SILICON [J].

NARAYAN, J ;

HOLLAND, OW ;

APPLETON, BR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04) :871-887

[9]

Narayan J., 1983, Laser-Solid Interactions and Transient Thermal Processing of Materials, P177

[10] PULSED LASER MELTING OF AMORPHOUS-SILICON LAYERS [J].

NARAYAN, J ;

WHITE, CW .

APPLIED PHYSICS LETTERS, 1984, 44 (01) :35-37

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