APPLICATION OF FACTOR-ANALYSIS TO ELEMENTAL DETECTION LIMITS IN SPUTTER DEPTH PROFILING

被引：51

作者：

GAARENSTROOM, SW

机构：

来源：

APPLIED SURFACE SCIENCE | 1986年 / 26卷 / 04期

关键词：

D O I：

10.1016/0169-4332(86)90127-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：561 / 574

页数：14

共 14 条

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[8]

Malinowski E. R., 1980, FACTOR ANAL CHEM, V3

[9] DETERMINATION OF NUMBER OF FACTORS AND EXPERIMENTAL ERROR IN A DATA MATRIX [J].

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[10]

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