CHARACTERIZATION OF THE INITIAL GROWTH OF SI ON CUBIC STABILIZED ZIRCONIA

被引:21
作者
LOEBS, VA [1 ]
HAAS, TW [1 ]
SOLOMON, JS [1 ]
机构
[1] UNIV DAYTON,RES INST,DAYTON,OH 45469
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期
关键词
D O I
10.1116/1.571965
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:596 / 599
页数:4
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