THICKNESS DETERMINATION OF ULTRATHIN FILMS BY AUGER-ELECTRON SPECTROSCOPY

被引：51

作者：

HOLLOWAY, PH ^{[1
]}

机构：

[1] SANDIA LABS,ALBUQUERQUE,NM 87115

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.568553

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1418 / 1422

页数：5

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