SEM AND TEM OBSERVATIONS OF 1ST AND 2ND-ORDER SPUTTER-INDUCED TOPOGRAPHY

被引：7

作者：

KUBBY, JA ^{[1
]}

SIEGEL, BM ^{[1
]}

机构：

[1] CORNELL UNIV,NATL RESOURCE & RES FACIL SUBMICRON STRUCT,ITHACA,NY 14853

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 13卷 / 1-3期

关键词：

D O I：

10.1016/0168-583X(86)90520-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：319 / 323

页数：5

共 19 条

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[5]

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[6] ANALYTICAL MODELING OF SPUTTER INDUCED SURFACE MORPHOLOGY [J].

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[8]

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[10]

GHOSE D, 1984, NUCL INSTRUM METH B, V1, P26

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