HIMOS - A HIGH EFFICENCY FLASH E(2)PROM CELL FOR EMBEDDED MEMORY APPLICATIONS

被引:41
作者
VANHOUDT, J
HASPESLAGH, L
WELLEKENS, D
DEFERM, L
GROESENEKEN, G
MAES, HE
机构
[1] IMEC,RES & DEV LAB,DIV MAT & PACKAGING,ANAL & RELIABIL GRP,LOUVAIN,BELGIUM
[2] IMEC,PROC DEV GRP,B-3001 LOUVAIN,BELGIUM
[3] UNIV LEUVEN,LOUVAIN,BELGIUM
关键词
D O I
10.1109/16.249473
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes a novel Flash E(2)PROM device, which is programmed with a highly efficient hot-electron injection mechanism. The High Injection MOS (HIMOS) device combines a very high programming speed at 5-V-only operation with a low development entry cost, which renders it a highly attractive concept for embedded memory applications. The HIMOS concept exhibits complete soft-write immunity and the possibility of overerasure without causing any problem in a memory architecture. Furthermore, it is shown that this device can also operate with a 3.3-V voltage supply, which is of a major importance for the nest generations of submicron Flash E(2)PROM technologies.
引用
收藏
页码:2255 / 2263
页数:9
相关论文
共 20 条
[1]   HOT-ELECTRON AND HOLE-EMISSION EFFECTS IN SHORT N-CHANNEL MOSFETS [J].
HOFMANN, KR ;
WERNER, C ;
WEBER, W ;
DORDA, G .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (03) :691-699
[2]  
Kazerounian R., 1988, International Electron Devices Meeting. Technical Digest (IEEE Cat. No.88CH2528-8), P436, DOI 10.1109/IEDM.1988.32849
[3]   A 512-KB FLASH EEPROM EMBEDDED IN A 32-B MICROCONTROLLER [J].
KUO, C ;
WEIDNER, M ;
TOMS, T ;
CHOE, H ;
CHANG, KM ;
HARWOOD, A ;
JELEMENSKY, J ;
SMITH, P .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1992, 27 (04) :574-582
[4]  
KURIYAMA M, 1992, IEEE INT SOL STAT CI, P152
[5]  
Liu D. K. Y., 1991, International Electron Devices Meeting 1991. Technical Digest (Cat. No.91CH3075-9), P315, DOI 10.1109/IEDM.1991.235440
[6]   A NEW ERASING AND ROW DECODING SCHEME FOR LOW SUPPLY VOLTAGE OPERATION 16-MB/64-MB FLASH MEMORIES [J].
MIYAWAKI, Y ;
NAKAYAMA, T ;
KOBAYASHI, S ;
AJIKA, N ;
OHI, M ;
TERADA, Y ;
ARIMA, H ;
YOSHIHARA, T .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1992, 27 (04) :583-588
[7]  
Naruke K., 1989, International Electron Devices Meeting 1989. Technical Digest (Cat. No.89CH2637-7), P603, DOI 10.1109/IEDM.1989.74353
[8]   EMISSION PROBABILITY OF HOT-ELECTRONS FROM SILICON INTO SILICON DIOXIDE [J].
NING, TH ;
OSBURN, CM ;
YU, HN .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (01) :286-293
[9]   CHARACTERIZATION AND SUPPRESSION OF DRAIN COUPLING IN SUBMICROMETER EPROM CELLS [J].
PRALL, K ;
KINNEY, WI ;
MACRO, J .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (12) :2463-2468
[10]   A 128K FLASH EEPROM USING DOUBLE-POLYSILICON TECHNOLOGY [J].
SAMACHISA, G ;
SU, CS ;
KAO, YS ;
SMARANDOIU, G ;
WANG, CYM ;
WONG, T ;
HU, CM .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1987, 22 (05) :676-683