HIGH-PERFORMANCE HYDROGENATED AMORPHOUS SI SOLAR-CELLS WITH GRADED BORON-DOPED INTRINSIC LAYERS PREPARED FROM DISILANE AT HIGH DEPOSITION RATES

被引：5

作者：

MATSUSHITA, T

KOMORI, K

KONAGAI, M

TAKAHASHI, K

机构：

来源：

APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 11期

关键词：

D O I：

10.1063/1.94625

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1092 / 1094

页数：3

共 6 条

[1] HIGH DEPOSITION RATE PREPARATION OF AMORPHOUS-SILICON SOLAR-CELLS BY RF GLOW-DISCHARGE DECOMPOSITION OF DISILANE [J].

KENNE, J ;

OHASHI, Y ;

MATSUSHITA, T ;

KONAGAI, M ;

TAKAHASHI, K .

JOURNAL OF APPLIED PHYSICS, 1984, 55 (02) :560-564

[2]

KONAGAI M, 1983, 2ND P INT WORKSH PHY

[3] HIGH-PERFORMANCE HYDROGENATED AMORPHOUS-SILICON SOLAR-CELLS MADE AT A HIGH DEPOSITION RATE BY GLOW-DISCHARGE OF DISILANE [J].

OHASHI, Y ;

KENNE, J ;

KONAGAI, M ;

TAKAHASHI, K .

APPLIED PHYSICS LETTERS, 1983, 42 (12) :1028-1030

[4] GLOW-DISCHARGE PREPARATION OF AMORPHOUS HYDROGENATED SILICON FROM HIGHER SILANES [J].

SCOTT, BA ;

BRODSKY, MH ;

GREEN, DC ;

KIRBY, PB ;

PLECENIK, RM ;

SIMONYI, EE .

APPLIED PHYSICS LETTERS, 1980, 37 (08) :725-727

[5] EFFECT OF B2H6 PROFILE ON THE PERFORMANCE OF A-SI-H P-I-N SOLAR-CELLS [J].

SICHANUGRIST, P ;

KUMADA, M ;

KONAGAI, M ;

TAKAHASHI, K ;

KOMORI, K .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) :1155-1158

[6] AMORPHOUS-SILICON SOLAR-CELLS WITH GRADED BORON-DOPED ACTIVE LAYERS [J].

SICHANUGRIST, P ;

KUMADA, M ;

KONAGAI, M ;

TAKAHASHI, K ;

KOMORI, K .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (11) :6705-6707

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