POTENTIAL ENHANCED SB AND AS DOPING IN SI MOLECULAR-BEAM EPITAXY

被引：42

作者：

KUBIAK, RAA

LEONG, WY

PARKER, EHC

机构：

来源：

APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 06期

关键词：

D O I：

10.1063/1.95540

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：565 / 567

页数：3

共 14 条

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[6]

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LEONG, WY ;

PARKER, EHC .

APPLIED PHYSICS LETTERS, 1984, 44 (09) :878-880

[8] ON BAKING A CRYOPUMPED UHV SYSTEM [J].

KUBIAK, RAA ;

LEONG, WY ;

KING, RM ;

PARKER, EHC .

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[9]

KUBIAK RAA, 1984, 3RD P INT C MBE SAN

[10]

KUBIAK RAA, 1985, J VAC SCI TECHNOL B, V3, P588

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