EFFECTS OF ION-IMPLANTED NITROGEN IMPURITIES ON MOLYBDENUM SILICIDE FORMATION

被引：5

作者：

HO, KT ^{[1
]}

NICOLET, MA ^{[1
]}

SCOTT, DM ^{[1
]}

机构：

[1] UNIV CALIF SAN DIEGO,LA JOLLA,CA 92093

来源：

THIN SOLID FILMS | 1985年 / 127卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(85)90222-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：171 / 179

页数：9

共 24 条

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[8] PROPERTIES OF A NEW MOLYBDENUM NITROGEN PHASE [J].

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[10]

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