APPLICATIONS OF PLASMA POLYMERIZATION

被引:16
作者
MORITA, S [1 ]
HATTORI, S [1 ]
机构
[1] NAGOYA UNIV,DEPT ELECTR,CHIKUSA KU,NAGOYA,AICHI 464,JAPAN
关键词
D O I
10.1351/pac198557091277
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
38
引用
收藏
页码:1277 / 1286
页数:10
相关论文
共 37 条
[1]  
BELL AT, 1980, TOPICS CURRENT CHEM, V94
[2]   DEPOSITION OF POLYMER-FILMS IN LOW-PRESSURE REACTIVE PLASMAS [J].
BIEDERMAN, H .
THIN SOLID FILMS, 1981, 86 (2-3) :125-135
[3]   ELECTRICAL PROPERTIES OF THIN ORGANIC FILMS [J].
BRADLEY, A ;
HAMMES, JP .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1963, 110 (01) :15-22
[4]  
BUZZARD PD, 1982, J APPL PHYS SOC, V27, P7965
[5]   ALIGNMENT AND WETTING PROPERTIES OF NEMATIC LIQUID-CRYSTALS ON PLASMA-POLYMERIZED FILMS [J].
DATTA, P ;
KAGANOWICZ, G ;
LEVINE, AW .
JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1981, 82 (01) :167-174
[6]   HEAT OF ATOMIZATION OF ALUMINUM DIFLUORIDE [J].
EHLERT, TC ;
MARGRAVE, JL .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1964, 86 (18) :3901-&
[7]  
Gazicki M., 1983, Plasma Chemistry and Plasma Processing, V3, P279, DOI 10.1007/BF00564629
[8]   DRY ETCH RESISTANCE OF ORGANIC MATERIALS [J].
GOKAN, H ;
ESHO, S ;
OHNISHI, Y .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (01) :143-146
[9]   EFFECT OF ATOMIC OXYGEN ON POLYMERS [J].
HANSEN, RH ;
PASCALE, JV ;
DEBENEDI.T ;
RENTZEPI.PM .
JOURNAL OF POLYMER SCIENCE PART A-GENERAL PAPERS, 1965, 3 (6PA) :2205-&
[10]   VACUUM LITHOGRAPHY USING PLASMA POLYMERIZATION AND PLASMA DEVELOPMENT [J].
HATTORI, S ;
TAMANO, J ;
YAMADA, M ;
IEDA, M ;
MORITA, S ;
YONEDA, K ;
ISHIBASHI, S .
THIN SOLID FILMS, 1981, 83 (02) :189-194