AN EMPIRICAL-MODEL FOR ION FORMATION FROM POLYMER SURFACES DURING ANALYSIS BY SECONDARY ION MASS-SPECTROMETRY

被引:62
作者
LEGGETT, GJ [1 ]
VICKERMAN, JC [1 ]
机构
[1] UMIST,SURFACE ANAL RES CTR,MANCHESTER H60 1QD,ENGLAND
来源
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES | 1992年 / 122卷
关键词
SIMS; ION FORMATION; POLYMER SURFACES;
D O I
10.1016/0168-1176(92)87021-6
中图分类号
O64 [物理化学(理论化学)、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号
070203 ; 070304 ; 081704 ; 1406 ;
摘要
Some of the models that have been proposed to account for ion formation during sputtering are reviewed. Particular attention is paid to models describing polyatomic ion formation. Aspects of these models that are relevant to ion formation from molecular materials are discussed. Reports describing the sputtering of polymeric materials are reviewed, and the bearing of recent tandem studies on attempts to formulate a model for ion formation from polymer materials is discussed. Some of the characteristics that a suitable model would possess are identified from the experimental data.
引用
收藏
页码:281 / 319
页数:39
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