PULSED ION-BEAM MELTING OF SILICON

被引:15
作者
FASTOW, R
MARON, Y
MAYER, J
机构
来源
PHYSICAL REVIEW B | 1985年 / 31卷 / 02期
关键词
D O I
10.1103/PhysRevB.31.893
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:893 / 898
页数:6
相关论文
共 12 条
[1]  
ANDERSON HH, 1977, HYDROGEN STOPPING PO, V3
[2]   PULSED ION-BEAM IRRADIATION OF SILICON [J].
CHU, WK ;
MADER, SR ;
GOREY, EF ;
BAGLIN, JEE ;
HODGSON, RT ;
NERI, JM ;
HAMMER, DA .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 194 (1-3) :443-447
[3]   RAPID SURFACE MELTING OF CU60 ZR40 METALLIC-GLASS [J].
FASTOW, R ;
GYULAI, J ;
NASTASI, M ;
ZIELINSKI, PG .
JOURNAL OF MATERIALS SCIENCE LETTERS, 1984, 3 (02) :109-111
[4]  
FASTOW R, 1983, LASER SOLID INTERACT
[5]  
FASTOW R, UNPUB
[6]   TIME-RESOLVED CONDUCTANCE AND REFLECTANCE MEASUREMENTS OF SILICON DURING PULSED-LASER ANNEALING [J].
GALVIN, GJ ;
THOMPSON, MO ;
MAYER, JW ;
PEERCY, PS ;
HAMMOND, RB ;
PAULTER, N .
PHYSICAL REVIEW B, 1983, 27 (02) :1079-1087
[7]  
GIBSON AF, 1960, PROGR SEMICONDUCTORS, V4, P259
[8]   ION-BEAM ANNEALING OF SEMICONDUCTORS [J].
HODGSON, RT ;
BAGLIN, JEE ;
PAL, R ;
NERI, JM ;
HAMMER, DA .
APPLIED PHYSICS LETTERS, 1980, 37 (02) :187-189
[9]  
NERI JM, 1982, THESIS CORNELL U
[10]  
PALMSTROM CJ, 1983, LASER SOLID INTERACT