共 12 条
[1]
ANDERSON HH, 1977, HYDROGEN STOPPING PO, V3
[2]
PULSED ION-BEAM IRRADIATION OF SILICON
[J].
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH,
1982, 194 (1-3)
:443-447
[4]
FASTOW R, 1983, LASER SOLID INTERACT
[5]
FASTOW R, UNPUB
[6]
TIME-RESOLVED CONDUCTANCE AND REFLECTANCE MEASUREMENTS OF SILICON DURING PULSED-LASER ANNEALING
[J].
PHYSICAL REVIEW B,
1983, 27 (02)
:1079-1087
[7]
GIBSON AF, 1960, PROGR SEMICONDUCTORS, V4, P259
[9]
NERI JM, 1982, THESIS CORNELL U
[10]
PALMSTROM CJ, 1983, LASER SOLID INTERACT