ACCELERATION FACTORS FOR THIN OXIDE BREAKDOWN

被引:70
作者
MCPHERSON, JW
BAGLEE, DA
机构
[1] Texas Instruments Inc, Houston, TX,, USA, Texas Instruments Inc, Houston, TX, USA
关键词
D O I
10.1149/1.2114251
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
21
引用
收藏
页码:1903 / 1908
页数:6
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