IRON REDISTRIBUTION AND COMPENSATION MECHANISMS IN SEMI-INSULATING SI-IMPLANTED INP

被引：17

作者：

BAHIR, G

MERZ, JL

ABELSON, JR

SIGMON, TW

机构：

[1] UNIV CALIF SANTA BARBARA,DEPT ELECT & COMP ENGN,SANTA BARBARA,CA 93106

[2] STANFORD UNIV,STANFORD ELECTR LABS,STANFORD,CA 94305

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 03期

关键词：

D O I：

10.1063/1.343086

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1009 / 1017

页数：9

共 28 条

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