SOME PROBLEMS AND PROSPECTS IN HIGH EROSION YIELD SPUTTERING

被引：7

作者：

CARTER, G ^{[1
]}

机构：

[1] UNIV SALFORD,THIN FILM & SURFACE RES CTR,SALFORD M5 4WT,LANCS,ENGLAND

来源：

VACUUM | 1984年 / 34卷 / 10-1期

关键词：

D O I：

10.1016/0042-207X(84)90157-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：819 / 824

页数：6

共 41 条

[1] DEPTH RESOLUTION OF SPUTTER PROFILING [J].

ANDERSEN, HH .

APPLIED PHYSICS, 1979, 18 (02) :131-140

[2]

Behrisch R., 1983, TOP APPL PHYS, V52

[3]

BEHRISCH R, 1983, TOPICS APPLIED PHYSI, V52

[4]

BEHRISCH R, 1981, TOPICS APPLIED PHYSI, V47

[5]

Brinkman JA, 1956, AM J PHYS, V24, P246, DOI [10.1119/1.1934201, DOI 10.1119/1.1934201]

[6] THE EROSION ENERGY EFFICIENCY OF SPUTTERING [J].

CARTER, G ;

NOBES, MJ ;

ARMOUR, DG .

VACUUM, 1982, 32 (08) :509-512

[7] A SEMI QUANTITATIVE APPROACH TO ION IMPACT INDUCED SHOCK PROCESSES IN SOLIDS [J].

CARTER, G .

RADIATION EFFECTS LETTERS, 1980, 50 (3-6) :105-109

[8] SHOCK-LIKE PROCESSES IN ION SOLID INTERACTIONS [J].

CARTER, G .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :1-11

[9] SPIKE AND SHOCK PROCESSES IN HIGH-ENERGY DEPOSITION DENSITY ATOMIC COLLISION EVENTS IN SOLIDS [J].

CARTER, G .

RADIATION EFFECTS LETTERS, 1979, 43 (4-5) :193-199

[10] THE INJECTION OF INERT-GAS IONS INTO SOLIDS - THEIR TRAPPING AND ESCAPE [J].

CARTER, G ;

ARMOUR, DG ;

DONNELLY, SE ;

INGRAM, DC ;

WEBB, RP .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 53 (3-4) :143-173

← 1 2 3 4 5 →