共 12 条
[1]
Chu W.-K., 1978, BACKSCATTERING SPECT
[6]
LAND DJ, 1976, ION BEAM SURFACE LAY, V2, P851
[7]
STUDY OF REACTIONS P-31(ALPHA,P)S-34 AND SI- 29(ALPHA,N)S-32
[J].
ZEITSCHRIFT FUR PHYSIK,
1971, 247 (05)
:453-&
[8]
ANNEALING BEHAVIOR OF C-IMPLANTED, N-IMPLANTED, MG-IMPLANTED, AL-IMPLANTED AND P-IMPLANTED SI AND GE
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
1983, 30 (02)
:87-93
[10]
SEGETH W, 1984, MAY P INT S 3 DAY DE, P66