BUCKLE FORMATION IN VACUUM-DEPOSITED THIN-FILMS

被引：43

作者：

YU, HY ^{[1
]}

KIM, C ^{[1
]}

SANDAY, SC ^{[1
]}

机构：

[1] USN,RES LAB,WASHINGTON,DC 20375

来源：

THIN SOLID FILMS | 1991年 / 196卷 / 02期

关键词：

D O I：

10.1016/0040-6090(91)90366-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A theoretical interpretation of the deformation pattern that develops in vacuum-deposited thin films after being exposed to atmospheric conditions is presented. A ratio between the characteristic dimensions of a unit cross-section of the debonded, buckled film is obtained by minimizing the strain energy of the displacement surface which is approximated by the product of two sinusoidal curves. The calculated ratio for the unit cross-section is in good agreement with experimental measurements. Energetic arguments are then invoked to explain the development of the observed film deformation patterns.

引用

页码：229 / 233

页数：5

共 18 条

[1]

ALNAIMI A, 1980, 8TH P INT VAC C CANN, P336

[2] EFFECT OF DELTAT (OXIDIZING TEMPERATURE MINUS COOLING TEMPERATURE) ON OXIDE SPALLATION [J].