ULTRAVIOLET OZONE CLEANING OF CARBON-CONTAMINATED OPTICS

被引：30

作者：

HANSEN, RWC

BISSEN, M

WALLACE, D

WOLSKE, J

MILLER, T

机构：

[1] UNIV ILLINOIS, DEPT PHYS, URBANA, IL 61801 USA

[2] UNIV ILLINOIS, MAT RES LAB, URBANA, IL 61801 USA

来源：

APPLIED OPTICS | 1993年 / 32卷 / 22期

关键词：

D O I：

10.1364/AO.32.004114

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

It is shown that ozone generated by UV light can be used to clean carbon-contaminated synchrotron-radiation optics.

引用

页码：4114 / 4116

页数：3

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