INSITU DC OXYGEN-DISCHARGE CLEANING SYSTEM FOR OPTICAL-ELEMENTS

被引：15

作者：

KOIDE, T

SHIDARA, T

TANAKA, K

YAGISHITA, A

SATO, S

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 07期

关键词：

D O I：

10.1063/1.1140869

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：2034 / 2037

页数：4

共 15 条

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[8] RESUSCITATION OF CARBON-CONTAMINATED MIRRORS AND GRATINGS BY OXYGEN-DISCHARGE CLEANING .1. EFFICIENCY RECOVERY IN THE 4-40-EV RANGE [J].

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[9] RESUSCITATION OF CARBON-CONTAMINATED MIRRORS AND GRATINGS BY OXYGEN-DISCHARGE CLEANING .2. EFFICIENCY RECOVERY IN THE 100-1000-EV RANGE [J].

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[10] INVESTIGATION OF CARBON CONTAMINATION OF SYNCHROTRON RADIATION MIRRORS [J].

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