Characterization and adhesion study of thin alumina coatings sputtered on PFT

被引：31

作者：

Cueff, R ^{[1
]}

Baud, G ^{[1
]}

Benmalek, M ^{[1
]}

Besse, JP ^{[1
]}

Butruille, JR ^{[1
]}

Dunlop, HM ^{[1
]}

Jacquet, M ^{[1
]}

机构：

[1] CTR RECH VOREPPE GRP PECHINEY, F-38340 VOREPPE, FRANCE

来源：

THIN SOLID FILMS | 1995年 / 270卷 / 1-2期

关键词：

adhesion; aluminium oxide; stress; X-ray photoelectron spectroscopy;

D O I：

10.1016/0040-6090(95)06917-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin amorphous alumina coatings have been deposited on polyethylene terephthalate (PET) by rf magnetron sputtering in a pure argon plasma. Their microstructure, composition, stresses and adhesion to the PET films have been studied. SEM microstructure study showed a good agreement with Thornton's structure zone model, i.e. a progression from a dense structure to a columnar structure was observed as the pressure was increased. The composition of deposits, determined by RES, showed that oxygen-rich alumina was obtained when high plasma pressures (more than 1 Pa) were used. FTIR spectra of alumina indicate that the excess oxygen was essentially due to the presence of hydroxyl groups in the coatings. The stress evolution in alumina deposits, determined by the bending beam method, was correlated with the microstructural change. Adhesion of alumina on PET has been studied by a peel test. Best results were obtained when sputtering parameters combined moderate power (1 W cm(-2)) and pressure of about 1 Pa. XPS analysis of the alumina/PET interface showed that bonding between the ceramic and the polymer occurred primarily via Al-O-C bonds.

引用

页码：230 / 236

页数：7

共 28 条

[1] A STUDY OF ELECTRON-BEAM EVAPORATED SIO2, TIO2, AND AL2O3 FILMS USING RBS, HFS, AND SIMS [J].