SIMULTANEOUS GROWTH OF RHOMBOHEDRAL AND AMORPHOUS BORON FILMS IN A LOW-PRESSURE B2H6+H2+HE PLASMA

被引：18

作者：

KOMATSU, S

MORIYOSHI, Y

机构：

来源：

关键词：

D O I：

10.1016/0022-0248(88)90219-9

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：560 / 570

页数：11

共 12 条

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