DECOMPOSITION OF NH3 ON SI(111)7X7 STUDIED USING LASER-INDUCED THERMAL-DESORPTION

被引：51

作者：

KOEHLER, BG

COON, PA

GEORGE, SM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 05期

关键词：

D O I：

10.1116/1.584476

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：1303 / 1310

页数：8

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