THERMAL NITRIDATION OF SI(100)-2X1 SURFACE BY NH3 - XPS RESULTS

被引：50

作者：

BISCHOFF, JL

KUBLER, L

BOLMONT, D

机构：

来源：

SURFACE SCIENCE | 1989年 / 209卷 / 1-2期

关键词：

D O I：

10.1016/0039-6028(89)90062-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：115 / 130

页数：16

共 30 条

[1] LOW-TEMPERATURE NITRIDATION AND HYDROGENATION OF SI FILMS WITH NH3 - A PHOTOEMISSION-STUDY [J].

BISCHOFF, JL ;

KUBLER, L ;

BOLMONT, D .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 97-8 :1407-1410

[2] THERMAL AND ELECTRON-BEAM-INDUCED REACTION OF DISILANE ON SI(100)-(2X1) [J].

BOZSO, F ;

AVOURIS, P .

PHYSICAL REVIEW B, 1988, 38 (06) :3943-3947

[3] LOW-PRESSURE OXIDATION OF SILICON STIMULATED BY LOW-ENERGY ELECTRON-BOMBARDMENT [J].

COLLOT, P ;

GAUTHERIN, G ;

AGIUS, B ;

RIGO, S ;

ROCHET, F .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1985, 52 (06) :1051-1069

[4] NITRIDATION OF SILICON (111) - AUGER AND LEED RESULTS [J].

DELORD, JF ;

SCHROTT, AG ;

FAIN, SC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01) :517-520

[5] KINETICS OF THE ADSORPTION OF O-2 AND OF THE DESORPTION OF SIO ON SI(100) - A MOLECULAR-BEAM, XPS, AND ISS STUDY [J].

DEVELYN, MP ;

NELSON, MM ;

ENGEL, T .

SURFACE SCIENCE, 1987, 186 (1-2) :75-114

[6] ELECTRON ENERGY-LOSS SPECTRA OF SI(111) REACTED WITH NITROGEN-ATOMS [J].

EDAMOTO, K ;

TANAKA, S ;

ONCHI, M ;

NISHIJIMA, M .

SURFACE SCIENCE, 1986, 167 (2-3) :285-296

[7] CHARACTERIZATION OF AMORPHOUS SIOX LAYERS WITH ESCA [J].

FINSTER, J ;

SCHULZE, D ;

MEISEL, A .

SURFACE SCIENCE, 1985, 162 (1-3) :671-679

[8] KINETICS OF SI(100) NITRIDATION 1ST STAGES BY AMMONIA - ELECTRON-BEAM-INDUCED THIN-FILM GROWTH AT ROOM-TEMPERATURE [J].

GLACHANT, A ;

SAIDI, D .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (04) :985-991

[9]

GLACHANT A, 1987, SURF SCI, V188, P199

[10] NITRIDATION OF SILICON AND OXIDIZED-SILICON [J].

HAYAFUJI, Y ;

KAJIWARA, K .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (09) :2102-2108

← 1 2 3 →