THE CONTROL AND MODELING OF DOPING PROFILES AND TRANSIENTS IN MOVPE GROWTH

被引：52

作者：

KUECH, TF

WANG, PJ

TISCHLER, MA

POTEMSKI, R

SCILLA, GJ

CARDONE, F

机构：

[1] IBM, Thomas J. Watson Research Cent, United States

来源：

JOURNAL OF CRYSTAL GROWTH | 1988年 / 93卷 / 1-4期

关键词：

D O I：

10.1016/0022-0248(88)90594-5

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：624 / 630

页数：7

共 15 条

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