GROWTH OF TEXTURED ZNO-IN THIN-FILMS BY CHEMICAL SPRAY DEPOSITION

被引：71

作者：

OLVERA, MD

MALDONADO, A

ASOMOZA, R

KONAGAI, M

ASOMOZA, M

机构：

[1] TOKYO INST TECHNOL,DEPT ELECT & ELECTR ENGN,MEGURO KU,TOKYO 152,JAPAN

[2] UAM IZTAPALAPA,DEPT QUIM,MEXICO CITY 09340,DF,MEXICO

来源：

THIN SOLID FILMS | 1993年 / 229卷 / 02期

关键词：

D O I：

10.1016/0040-6090(93)90364-U

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Indium-doped zinc oxide thin films were grown using the chemical spray deposition technique and different doping compounds in the starting solution. In particular, indium chloride, indium sulfate and indium acetate were used as indium sources. The films show a high degree of preferential crystalline orientation which depends mainly on the type of doping compound and the substrate temperature. The lowest value of the resistivity is 2 x 10(-3) OMEGA cm and the transmittance is on average higher than 90%. It was found that the texture of the films could be changed quite easily making it possible to grow films for different applications.

引用

页码：196 / 200

页数：5

共 25 条

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