SUBSTRATE-TEMPERATURE EFFECT ON THE OPTICAL-PROPERTIES OF RADIO-FREQUENCY SPUTTERED CUINSE2 THIN-FILMS

被引：4

作者：

SANTAMARIA, J

MARTIL, I

IBORRA, E

DIAZ, GG

QUESADA, FS

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.576296

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1424 / 1427

页数：4

共 13 条

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[8] TEMPERATURE AND BIAS EFFECTS ON THE ELECTRICAL-PROPERTIES OF CDS THIN-FILMS PREPARED BY RF SPUTTERING [J].

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