TEMPERATURE AND BIAS EFFECTS ON THE ELECTRICAL-PROPERTIES OF CDS THIN-FILMS PREPARED BY RF SPUTTERING

被引：28

作者：

MARTIL, I

GONZALEZDIAZ, G

SANCHEZQUESADA, F

机构：

来源：

THIN SOLID FILMS | 1984年 / 114卷 / 04期

关键词：

D O I：

10.1016/0040-6090(84)90132-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：327 / 334

页数：8

共 12 条

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