DEPOSITION DEPENDENCE OF RF-SPUTTERED CDS FILMS

被引：33

作者：

MARTIL, I

GONZALEZDIAZ, G

SANCHEZQUESADA, F

RODRIGUEZVIDAL, M

机构：

来源：

THIN SOLID FILMS | 1982年 / 90卷 / 03期

关键词：

D O I：

10.1016/0040-6090(82)90374-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：253 / 257

页数：5

相关论文

共 9 条

[1] COMPOSITION OF RF-SPUTTERED ZNS FILMS
CRITCHLEY, BR
STEVENS, PRC
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1978, 11 (04) : 491 - 498
[2] APPLICATION OF REACTIVE CATHODE SPUTTERING TO PRODUCTION OF PHOTOSENSITIVE CDS
DURAND, S
DEFORGES, J
BATAILLE.G
BUGNET, P
[J]. THIN SOLID FILMS, 1972, 11 (02) : 237 - &
[3] SPUTTER-DEPOSITED CDS FILMS WITH HIGH PHOTOCONDUCTIVITY THROUGH FILM THICKNESS
FRASER, DB
MELCHIOR, H
[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (07) : 3120 - &
[4] RF-SPUTTERED CADMIUM SULFIDE THIN-CRYSTALS
LAGNADO, I
LICHTENSTEIGER, M
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1970, 7 (02): : 318 - +
[5] MAISSEL LI, 1970, HDB THIN FILM TECHNO, pCH4
[6] CDS-CUXS HETEROJUNCTIONS PRODUCED BY SPUTTERING,R.F.
MULLER, W
FREY, H
RADLER, K
SCHULLER, KH
[J]. THIN SOLID FILMS, 1979, 59 (03) : 327 - 336
[7] RF SPUTTERING OF GALLIUM-PHOSPHIDE THIN-FILMS
STAROSTA, K
ZELINKA, J
BERKOVA, D
KOHOUT, J
[J]. THIN SOLID FILMS, 1979, 61 (02) : 241 - 248
[8] VOOSEN JL, 1971, J VAC SCI TECHNOL, V8, pS12
[9] ELECTRICAL PROPERTIES OF EVAPORATED FILMS OF CADMIUM-SULFIDE
WILSON, JIB
WOODS, J
[J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1973, 34 (02) : 171 - 181