COMPOSITION OF RF-SPUTTERED ZNS FILMS

被引:22
作者
CRITCHLEY, BR
STEVENS, PRC
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D O I
10.1088/0022-3727/11/4/013
中图分类号
O59 [应用物理学];
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页码:491 / 498
页数:8
相关论文
共 9 条
[1]  
BRIGGS D, 1975, DISC FARAD SOC, V60, P81
[2]   ELASTIC SCATTERING OF ALPHA-PARTICLES BY OXYGEN [J].
CAMERON, JR .
PHYSICAL REVIEW, 1953, 90 (05) :839-844
[3]   CHEMICAL-SHIFTS IN PHOTOEXCITED AUGER-SPECTRA [J].
CASTLE, JE ;
EPLER, D .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1974, 339 (1616) :49-72
[4]   PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J].
CHU, WK ;
MAYER, JW ;
NICOLET, MA ;
BUCK, TM ;
AMSEL, G ;
EISEN, F .
THIN SOLID FILMS, 1973, 17 (01) :1-41
[5]   THIN-FILM ANALYSIS USING RUTHERFORD SCATTERING [J].
MORGAN, DV .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1974, 7 (05) :653-662
[7]  
TOWNSEND PD, 1976, ION IMPLANTATION SPU, pCH8
[8]   CHEMICAL-SHIFTS OF AUGER LINES, AND AUGER PARAMETER [J].
WAGNER, CD .
FARADAY DISCUSSIONS, 1975, 60 :291-300
[9]  
WEHNER GK, 1970, HDB THIN FILM TECHNO, P3