INTRINSIC STRESS IN DIAMOND-LIKE CARBON-FILMS AND ITS DEPENDENCE ON DEPOSITION PARAMETERS

被引：48

作者：

NIR, D ^{[1
]}

机构：

[1] NASA,LEWIS RES CTR,CLEVELAND,OH 44135

来源：

THIN SOLID FILMS | 1987年 / 146卷 / 01期

关键词：

D O I：

10.1016/0040-6090(87)90337-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

FILMS

引用

页码：27 / 43

页数：17

共 42 条

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