LASER ANNEALING OF THE SI-AU INTERFACE

被引:1
作者
CROS, A
MARFAING, J
SALVAN, F
DERRIEN, J
KERHERVE, F
机构
[1] UNIV HAUTE ALSACE,INST SCI EXACTES & APPL,F-68093 MULHOUSE,FRANCE
[2] ECOLE NORMALE SUPER,PHYS SOLIDES GRP,F-75221 PARIS,FRANCE
关键词
D O I
10.1016/0040-6090(83)90225-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:17 / 24
页数:8
相关论文
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