ELECTROMECHANICAL PROPERTIES OF THIN VO2 FILMS ON POLYIMIDE SUBSTRATES

被引:11
作者
HAKIM, MO [1 ]
BABULANAM, SM [1 ]
GRANQVIST, CG [1 ]
机构
[1] CHALMERS UNIV TECHNOL,DEPT PHYS,S-41296 GOTHENBURG,SWEDEN
关键词
ELECTRIC CONDUCTIVITY - POLYIMIDES - SEMICONDUCTOR MATERIALS - STRAIN GAGES - SUBSTRATES;
D O I
10.1016/0040-6090(88)90037-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
VO//2 films have been produced on polyimide substrates by reactive electron beam evaporation followed by annealing post-treatment. Films with thicknesses of about 0. 5 mu m had a gauge factor about 100 times larger than that for conventional strain gauges. The temperature dependence of the resistivity may be explained in terms of a strain-sensitive semiconductor-metal transition in somewhat inhomogeneous VO//2. However, this model accounts neither for the film thickness dependence of the gauge factor nor for the fact that polyimide is superior to glass as a substrate material. It is conceivable that a partially pyrolyzed surface layer plays some role in polyimide foils.
引用
收藏
页码:L49 / L52
页数:4
相关论文
共 16 条
  • [11] PYROLYSATION KINETICS AND OPTICAL-PROPERTIES OF POLYIMIDE FOIL
    SERBINOV, IA
    NIKLASSON, GA
    GRANQVIST, CG
    [J]. JOURNAL OF MATERIALS SCIENCE LETTERS, 1987, 6 (09) : 1113 - 1114
  • [12] STTRAP H, 1986, THIN SOLID FILMS, V137, pL43
  • [13] STRESS-INDUCED SWITCHING IN VO2 THIN-FILMS
    UFERT, KD
    [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1976, 34 (01): : K83 - K86
  • [14] ELECTROMECHANICAL PROPERTIES OF THIN-FILMS AND THIN-FILM STRAIN GAUGE
    WITT, GR
    [J]. THIN SOLID FILMS, 1974, 22 (02) : 133 - 156
  • [15] WORSHNOP BL, 1951, ADV PRACTICAL PHYS S, P73
  • [16] [No title captured]