STUDY OF SOLID-PHASE AND MOLECULAR-BEAM EPITAXIAL COBALT SILICIDE FILMS ON SI(111) USING ELECTRON-ENERGY LOSS SPECTROSCOPY

被引：7

作者：

DEFRESART, E

KAO, YC

WANG, KL

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 02期

关键词：

D O I：

10.1116/1.583586

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：645 / 648

页数：4

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